Multi-Scale Analysis for CVD Processes. 1st Report. Construction of Silane Intermolecular Potential.
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B
سال: 2002
ISSN: 0387-5016,1884-8346
DOI: 10.1299/kikaib.68.1948